KS D ISO 19319-2020 表面化學(xué)分析 俄歇電子能譜和X射線光電子能譜 橫向分辨率、分析面積和分析儀觀察到的樣品面積的測(cè)定
Surface chemical analysis-Auger electron spectroscopy and X-ray photoelectron spectroscopy-Determination of lateral resolution, analysis area, and sample area viewed by the analyzer